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High Purity SiH4(Silane)
Product Detailed
Related Categories:Other Inorganic Chemicals
Silane (SiH4)
Used for standard gas, extension, diffusion, chemical phase deposition.
Item | Specification | |
Purity | SiH4 | 99.9999% (excluded H2) |
Impurity( PPMV ) | O2 + Ar | < 0.1 |
N2 | < 0.1 | |
H2 | < 20.0 | |
CO | < 0.1 | |
CO2 | < 0.1 | |
H2O | < 0.1 | |
C11~C3 | <0.2 | |
Al | < 0.2 | |
Sb | < 0.2 | |
As | < 0.2 | |
B | < 0.2 | |
Ga | < 0.2 | |
P | < 0.2 | |
Cr+Cu+Fe+Ni+Zn | <1.0 | |
Resistivity N type | >10000 | |
Type | Material | Filling Weight (Max.) | Valve Connection Type |
47L | Mn Steel | 12kg | JIS 22L,DISS 632,CGA 350 |
Y-Cylinder | Cr-Mo Steel | 120kg | |
ISO Container | 2,200kg/4,500kg |
High Purity SiH4(Silane)
